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STAGE DEVICE, MINUTE OPERATION DEVICE, AND METHOD OF CONTROLLING SAME
专利权人:
CANON KABUSHIKI KAISHA
发明人:
Toru Matsumoto,Hitoshi Nishitani
申请号:
US16703183
公开号:
US20200179005A1
申请日:
2019.12.04
申请国别(地区):
US
年份:
2020
代理人:
摘要:
A stage device capable of performing piercing vibration and translational driving by using one actuator, and performing very low-speed driving in the translational driving with high accuracy. The stage device includes an X stage having a vibration actuator that includes an vibration element and a contact body, one of which is a movable body connected to an object to be driven, and drives the object to be driven in an X-axis direction, and a control section that controls driving of the vibration actuator. The control section causes two-phase AC voltages to be applied to an electromechanical energy conversion element to thereby excite predetermined vibrations in the vibration element, to drive the vibration actuator by switching between a movement mode for moving the object to be driven in the X-axis direction and a vibration mode for vibrating the object to be driven in the X-axis direction.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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