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System and method for laser photoaltering a material using multi-beam scanning
专利权人:
AMO Development LLC
发明人:
Bor, Zsolt,Holland, Guy V.,Horvath, Christopher
申请号:
AU2009322589
公开号:
AU2009322589B2
申请日:
2009.12.01
申请国别(地区):
AU
年份:
2014
代理人:
摘要:
The present application relates to systems (10) and method of photoaltering a material. The system (10) includes a laser source (14) operable to produce a primary pulsed beam (18), a holographic optical element (32) configured to receive the primary pulsed beam (18) and transmit a plurality of secondary beams (36), and a scanner (20) operable to direct the secondary beams (36) to the material. The secondary beams (36) are based on the primary pulsed beam (18). The method includes phase shifting a pulsed laser beam to produce an input beam (36), holographically altering the input beam to produce a plurality of transmission beams (36), and scanning a portion of the material (12) with the transmission beams (36).
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