Georg Soumagne,Yoshifumi Ueno,Hiroshi Komori,Akira Sumitani,Katsunobu Nishihara,Young Gwang Kang,Masanori Nunami
申请号：
US13047131
公开号：
US08354657B2
申请日:
2011.03.14
申请国别(地区):
US
年份:
2013
代理人:
摘要：
In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The apparatus includes a chamber, a target supply unit for supplying a target material into the chamber, a collector mirror for collecting extreme ultra violet light radiated from plasma generated by irradiating the target material with a laser beam to output the extreme ultra violet light, an electromagnet arranged outside of the chamber, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the electromagnet extend.
