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ULTRASONIC PROBE
专利权人:
Hitachi; Ltd.
发明人:
SAKO, Akifumi,TAKENAKA, Tomoko,ISHIDA, Kazunari
申请号:
EP12731949
公开号:
EP2662024A4
申请日:
2012.01.05
申请国别(地区):
EP
年份:
2017
代理人:
摘要:
Disclosed is an ultrasonic probe comprising: CMUT cells (13) that mutually convert ultrasonic waves and electrical signals a semiconductor substrate (15) that has a plurality of the CMUT cells (13) formed on the surface thereof an acoustic lens (3) that is provided on the front face side of the CMUT cells (13) and a backing layer (5) that is provided on the rear face side of the semiconductor substrate (15). The backing layer (5) is formed by a first backing layer (27) that makes contact with the semiconductor substrate, and a second backing layer (29) that is provided on the rear face side of the backing layer (27). The acoustic impedance of the backing layer (27) is set based on the sheet thickness of the semiconductor substrate (15). The backing layer (29) is formed by attenuating material capable of attenuating ultrasonic waves transmitted through the backing layer (27). Multiple reflection of reflection echoes is suppressed by setting the acoustic impedance of the backing layer (29) to match the acoustic impedance of the backing layer (27).
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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