Aspects of the present disclosure include methods for making an electrode for an electrochemical sensor. In practicing methods according to certain embodiments, a conductive layer is deposited on a substrate by high voltage electron beam thermal evaporation followed by depositing a reactive layer on a surface of the conductive layer by low-voltage resistive thermal evaporation using a sequential step, single production chamber. Also provided are methods for a producing a multi-layered reference electrode having silver or ITO and silver chloride thereon in the absence of a separate curing stage. Systems for practicing the subject methods are also described.
