PROBLEM TO BE SOLVED: To provide a decontamination liquid supply device which can eliminate the necessity of an air purge operation to enhance operability, and can simplify the structure as compared with the conventional devices.SOLUTION: A gas supply passage 13 for supplying a gas is connected to a decontamination liquid supply passage 5 more on the side of a tail end portion 5a than delivery means 4, and an on-off valve 14 which opens and closes the gas supply passage is provided. Control means 3 stores a housed weight R of the decontamination liquid which is housed in the decontamination liquid supply passage between a connection point A at which the above described gas supply passage is connected to the decontamination liquid supply passage and the above described tail end portion 5a. When a weight of the decontamination liquid is reduced by a total value of a predetermined weight W which is to be supplied to downstream side equipment and the above described housed weight R as a result of starting supply of the decontamination liquid to the above described downstream side equipment, the control means opens the above described on-off valve to return the decontamination liquid at the upstream side from the connection point, that is, the decontamination liquid of the housed weight R to the decontamination liquid storing means, while supplying the decontamination liquid of the predetermined weight W to the downstream side equipment.COPYRIGHT: (C)2012,JPO&INPIT【解決手段】 送液手段4よりも末端部5a側の除染液供給通路5に気体を供給する気体供給通路13を接続するとともに、該気体供給通路を開閉する開閉弁14を設けてある。制御手段3には、上記気体供給通路を除染液供給通路に接続した接続点Aと上記末端部5aとの間の除染液供給通路に収容される除染液の収容重量Rを記憶させてある。制御手段は、上記下流側機器に除染液の供給を開始することにより、該除染液の重量が下流側機器に供給すべき所定重量Wと上記収容重量Rとの合計値分だけ小さくなったら、上記開閉弁を開いて接続点よりも上流側の除染液、すなわち収容重量Rの除染液を除染液貯溜手段に戻させる一方、所定重量Wの除染液は下流側機器に供給する。【効果】 従来必要とされたエア抜き作業やエア抜き配管を省略することができる。【選択図】 図1
