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Liquid processing apparatus including container, first and second electrodes, insulator surrounding at least part of side face of the first electrode, gas supply device, metallic member surrounding part of side face of the first electrode, and power source
专利权人:
Panasonic Intellectual Property Management Co.; Ltd.
发明人:
Minoru Egawa
申请号:
US15900994
公开号:
US10446375B2
申请日:
2018.02.21
申请国别(地区):
US
年份:
2019
代理人:
摘要:
A liquid processing apparatus includes a container for holding liquid, a first electrode, a second electrode, a first insulator that has a cylindrical shape and at least partly surrounds a side face of the first electrode via a space, the first insulator having an opening in an end face of the first insulator, a gas supply device that supplies gas into the space and releases the gas into the liquid via the opening, a power source that applies a voltage between the first electrode and the second electrode and generates plasma, and a metallic member that partly surrounds the side face of the first electrode via the space. The metallic member is electrically connected to the first electrode. At least a part of the first insulator is disposed between the first electrode and the metallic member.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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