PROBLEM TO BE SOLVED: To apply an air blowing mechanism for supplying air to a gap between a peripheral wall of a rotating tank and an outer circumferential edge of a disk, in a coating tank in which the rotating tank and the disk can rotate independently.SOLUTION: The air blowing mechanism 13 having a connection part (connection member 75) for connection with an air supply source 76, includes: a support member 71 for rotatably supporting a coating tank 22 a flow-in space 74 provided between the support member 71 and the coating tank 22, and communicating with the connection member 75 and a ventilation passage 77 provided in the coating tank 22, and communicating the flow-in space 74 to a ventilation space 72.COPYRIGHT: (C)2012,JPO&INPIT【課題】回転槽とディスクを互いに独立して回転させるコーティング槽において、回転槽の周壁部とディスクの外周縁との隙間にエアを供給するエアブロー機構を適用できるようにする。【解決手段】エアブロー機構13は、エア供給源76との接続部(接続部材75)を有し、コーティング槽22を回転可能に支持する支持部材71と、支持部材71とコーティング槽22との間に設けられ、接続部材75に連通する流入空間74と、コーティング槽22に設けられ、流入空間74を通気空間72に連通させる通気路77とを備えて構成されている。【選択図】図3
