The object, to create a method for producing multilayers ormultilayer systems wherein the structures generated on asubstrate can easily be jointly detached from the substrateand are preserved in a composite, is achieved by thepresent invention by means of a method for producingimplant structures comprising generating a first metallayer on a substrate, generating a second metal layer abovethe first metal layer, producing a number of multilayeredimplant structures above the second metal layer, removingthe first metal layer between the substrate and the secondmetal layer, and releasing the implant structures from thesubstrate in a coherent composite. With the methodaccording to the invention, between the implant structuresand the substrate a release layer is generated consistingof two or three metal layers which serve as sacrificiallayer in the course of releasing the fully processedmultilayers by means of an under-etching process. As aresult, a uniform and reliable separation of the finishedmultilayers from the substrate in a composite is achieved,facilitating the subsequent technology for assembly andinterconnection of the implant structures.
