PROBLEM TO BE SOLVED: To provide a composite single-crystal piezoelectric vibrator that can be improved in performance such as electrostatic capacity between channels after array dicing, a coupling coefficient, sensitivity, and a specific band.SOLUTION: A plurality of single-crystal piezoelectric vibrating elements are arrayed in at least one of a first direction and a second direction orthogonal to the first direction. Electrodes are provided on an ultrasonic radiation surface side and a back surface side parallel with the first and second directions respectively among a plurality of surfaces of the single-crystal piezoelectric vibrating elements. A medical composite single-crystal piezoelectric vibrator is such that the single-crystal vibrating element on the ultrasonic radiation surface has a crystal orientation {100}, a crystal orientation of a first surface, perpendicular to the first direction, of at least one of the single-crystal piezoelectric vibrating elements being different from crystal orientations of first surfaces of other single crystal piezoelectric vibrating elements, and a crystal orientation of a second surface, perpendicular to the second direction, of at least the one of the single-crystal piezoelectric vibrating elements being different from crystal orientations of second surfaces of the other single crystal piezoelectric vibrating elements.COPYRIGHT: (C)2013,JPO&INPIT【課題】アレイダイシング後のチャンネル間の静電容量、結合係数、感度、比帯域などの性能を向上することができる複合単結晶圧電振動子を提供する。【解決手段】複数の単結晶圧電振動素子は、第1方向と前記第1方向に直交する第2方向とのうち少なくとも一つに沿って配列される。電極は、単結晶圧電振動素子における複数の面のうち、第1、第2方向にそれぞれ平行な超音波放射面側と背面側とに設けられる。医用複合単結晶圧電振動子は、前記超音波放射面側における前記単結晶振動素子の結晶方位が{100}であり、前記単結晶圧電振動素子のうち少なくとも一つにおける前記第1方向に垂直な第1面の結晶方位が、他の単結晶圧電振動素子における前記第1面の結晶方位と異なり、前記単結晶圧電振動素子のうち少なくとも一つにおける前記第2方向に垂直な第2面の結晶方位が、他の単結晶圧電振動素子における前記第2面の結晶方位と異なる。【選択図】図1
