PROBLEM TO BE SOLVED: To provide an ultrasonic (US) element 20 in which characteristics are stabilized.SOLUTION: An ultrasonic (US) element 20 comprises a silicon substrate 11, wherein the following layers are laminated on the silicon substrate 11 in the following order: a lower electrode layer 12 having a plurality of lower electrode parts 12A and a plurality of lower wiring parts 12B and connected to a lower electrode terminal 52 to which a drive signal and a bias signal are applied a lower insulating layer 13 an upper insulating layer 15 on which a plurality of cavities 14 are formed an upper electrode layer 16 having a plurality of upper electrode parts 16A and a plurality of upper wiring parts 16B, and connected to an upper electrode terminal 51 of ground potential for detecting a capacity signal and a protection layer 17. The US element further comprises a shielding electrode part 71 formed at least on top of the lower wiring parts 12B and connected to a shielding electrode terminal 53 of the ground potential.COPYRIGHT: (C)2013,JPO&INPIT【課題】特性が安定したUSエレメント20を提供する。【解決手段】USエレメント20は、シリコン基板11と、複数の下部電極部12Aと複数の下部配線部12Bとを有し駆動信号およびバイアス信号が印加される下部電極端子52と接続された下部電極層12と、下部絶縁層13と、複数のキャビティ14が形成された上部絶縁層15と、複数の上部電極部16Aと複数の上部配線部16Bとを有し容量信号を検出するためのグランド電位の上部電極端子51と接続された上部電極層16と、保護層17と、がシリコン基板11の上に順に積層されており、少なくとも前記下部配線部12Bの上側に形成された、グランド電位の遮蔽電極端子53と接続された遮蔽電極部71を更に具備する。【選択図】図6
