Knippels Guido,Ubink Geert,Yang Jianfei,Tan Eric Meng Meng,Boeren Marcel
申请号：
US201615048201
公开号：
US10134650(B2)
申请日:
2016.02.19
申请国别(地区):
美国
年份:
2018
代理人:
Ostrolenk Faber LLP
摘要：
A wafer cutting apparatus comprises a wafer positioning device for holding a wafer that is substantially covered with an opaque material such as molding compound and that has an exposed peripheral area, and for displacing the wafer relative to a wafer inspection system comprising a camera having a field of view. To perform visual data acquisition of said dicing street portions, the wafer is displaced such that a center of the camera's field of view follows a path along the exposed peripheral area of the wafer. A processing unit analyzes the visual data acquired for detecting or calculating locations and directions of the dicing streets. A wafer cutting tool cuts the wafer along straight lines between the dicing street portions which have been detected or calculated by the processing unit.
