PROBLEM TO BE SOLVED: To provide a shape detection device which is simple in a configuration for transmitting an ultrasonic wave, and is short in measuring time.SOLUTION: The shape detection device includes a transmission part for transmitting the ultrasonic wave simultaneously from a plurality of transducers 22a-22 to an object 10, a reception part for receiving surface reflected waves from the surface 10a of the object by the plurality of transducers 22a-22l, an incoming direction detection part 82a, a propagation time detection part 82b, surface reflection point detection part 82c and a shape deriving part 82d. The incoming direction detection part 82a detects the incoming direction of the surface reflected wave reaching each transducer group, with two adjacent transducers among the plurality of transducers 22a-22l as one transducer group. The propagation time detection part 82b detects the propagation time of the surface reflected wave reaching each transducer group. The surface reflection point detection part 82e detects a reflection point on the surface 10a of the ultrasonic wave using the incoming direction and propagation time of the surface reflected wave reaching each transducer group. The shape deriving part 82 derives the shape of the surface 10a using the plurality of detected reflection points.COPYRIGHT: (C)2010,JPO&INPIT【課題】超音波の送波を行うための構成が簡易であって、測定時間の短い形状検出装置を提供する。【解決手段】形状検出装置は、対象物10に対して複数の振動子22a~22から同時に超音波を送波する送波部と、対象物の表面10aからの表面反射波を複数の振動子22a~22lにより受波する受波部と、到来方向検出部82aと伝播時間検出部82bと表面反射点検出部82cと形状導出部82dとを備える。到来方向検出部82aは、複数の振動子22a~22lのうち隣接する2つの振動子を1組の振動子組として、各振動子組に到達する表面反射波の到来方向を検出し、伝播時間検出部82bは、各振動子組に到達する表面反射波の伝播時間を検出する。表面反射点検出部82eは、各振動子組に到達する表面反射波の到来方向及び伝播時間とを用いて、超音波の表面10a上の反射点を検出し、形状導出部82は、検出された複数の反射点を用いて表面10aの形状を導出する。【選択図】図1
