PROBLEM TO BE SOLVED: To provide a method of producing a vapor deposition mask capable of meeting both requirements of high definition and lightening even when enlarged, a metal-mask-provided resin layer used in the method of producing a vapor deposition mask, and a method of producing an organic semiconductor element enabling production of a high-definition organic semiconductor element.SOLUTION: A method of producing a vapor deposition mask (100) consisting of a metal mask (10) formed with a slit (15) and a resin mask (21) which is provided with an opening (25) corresponding to a pattern to be formed by vapor deposition at a position overlapping with the slit, with the metal mask and the resin mask being laminated, includes the steps of: preparing a metal-mask-provided resin layer (60) laminated with a metal mask and formed with a slit on one side of a resin layer (20); forming a protective layer (30) on the other side of the resin layer of the metal-mask-provided resin layer; irradiating the metal-mask-pro
