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Ultrasonic probe and method for manufacturing the same and ultrasonic diagnostic device
专利权人:
Shuzo Sano
发明人:
Shuzo Sano,Akifumi Sako,Takashi Kobayashi,Mikio Izumi
申请号:
US12525353
公开号:
US08540640B2
申请日:
2008.02.27
申请国别(地区):
US
年份:
2013
代理人:
摘要:
An ultrasonic probe (2) comprises a cMUT chip (20), which has a plurality of vibration elements whose electromechanical coupling coefficient or the sensitivity changes depending on a bias voltage, and transmits/receives an ultrasonic wave an acoustic lens (26) provided on the ultrasonic wave radiation side of the cMUT chip (20) a backing layer (22) provided on the back side of the cMUT chip (20) for absorbing propagation of the ultrasonic wave an electric wiring portion (flexible substrate (72)), which is provided from the peripheral portion of the cMUT chip (20) to the side face of the backing layer (22) and has a signal pattern connected with the electrode of the cMUT chip (20) arranged thereon and a housing (ultrasonic probe cover (25)) for containing the cMUT chip (20), the acoustic lens (26), the backing layer (22) and the electric wiring portion (flexible substrate (72)). A ground layer (conductive film (76)) of ground potential is provided on the ultrasonic wave radiation side of the cMUT chip (20).
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中国工程科技知识中心
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