Peter M. Baumgart;Chirag Rajyaguru;J. Martin Algots;Abhiram Govindaraju
发明人:
Peter M. Baumgart,J. Martin Algots,Abhiram Govindaraju,Chirag Rajyaguru
申请号：
US13328628
公开号：
US09279445B2
申请日:
2011.12.16
申请国别(地区):
US
年份:
2016
代理人:
摘要：
Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.
