A hollow microtube structure capable of being used as a minimally invasive electrode, a production method thereof, and a biopsy device using the hollow microtube structure. The hollow microtube structure includes a semiconductor substrate and at least one hollow tube formed on a surface of the semiconductor substrate. The hollow tube includes a metal coating film layer on the inner surface and an electrically insulating coating film layer on the outer surface. The semiconductor substrate includes a through hole communicated with an interior of a hollow tube at a location where the hollow tube is formed. The production method includes an etching, a sacrificial layer forming, a metal coating film layer forming, an electrically insulating coating film layer forming, a tip portion removing, and a piercing. The biopsy device can be provided on a substrate side of the hollow microtube structure with at least one of an electric signal transmitter, an optical signal generator, a chemical fluid injector, an electrical measuring device, a chemical measuring device, and an optical measuring device.
