A method for energy setting of pulsed, focused laser radiation is provided. In the method, a relationship between a threshold pulse energy required for causing irreversible damage in a material and a pulse duration is established. The relationship allows for obtaining a threshold pulse energy for each of a plurality of pulse durations, including one or more pulse durations in a range between 200 fs and smaller. The relationship defines a decreasing threshold pulse energy for a decreasing pulse duration in the range between 200 fs and smaller. For a given pulse duration in the range between 200 fs and smaller, an associated threshold pulse energy is determined based on the established relationship. The pulse energy of the laser radiation is set based on the determined associated threshold pulse energy.
