PROBLEM TO BE SOLVED: To easily and surely carry out sterilization treatment of a sliding part 20 on the atmosphere side in the same way as other sliding parts 20 in carrying out sterilization treatment of the inside of a treatment container 2 and each sliding part 20 while sliding a rotary shaft 4 by a mechanical seal device 1 in which the sliding parts 20 are arranged at two parts at least from the treatment container 2 side toward the atmosphere side along the length direction of the rotary shaft 4 on the outside of the treatment container 2 between the treatment container 2 for carrying out treatment in a sterilized state inside, and the rotary shaft 4 used with one end side thereof inserted into the treatment container 2 from the atmosphere side.SOLUTION: An airtight region 30 is provided for making airtight a region communicating with the sliding part 20 on the atmosphere side over the circumferential direction of the rotary shaft 4 on the atmosphere side of the sliding part 20, and sterilizing gas supplied to a seal fluid supply region 22 which is a region between the rotary shaft 4 and a device body 21 of the mechanical seal device 1 to sterilize each sliding part 20 is held in the airtight region 30.COPYRIGHT: (C)2013,JPO&INPIT【課題】その内部において滅菌状態で処理を行うための処理容器2と、この処理容器2内に大気側からその一端側を挿入して用いられる回転軸4と、の間で処理容器2の外側において回転軸4の長さ方向に沿って処理容器2側から大気側に向かって少なくとも2箇所に摺動部20が配置されたメカニカルシール装置1により回転軸4を摺動させると共に、処理容器2内及び各摺動部20の滅菌処理を行うにあたって、大気側の摺動部20についても他の摺動部20と同様に簡便に確実に滅菌処理を行う。【解決手段】大気側の摺動部20と連通する領域を当該摺動部20の大気側において回転軸4の周方向に亘って気密にする気密領域30を設けて、各摺動部20を滅菌するために回転軸4とメカニカルシール装置1の装置本体21との間の領域であるシール流体供給領域22に供給される滅菌用ガスを当該気密領域30内に保持する。【選択図】図2