Niclas Roxhed,Staffan Johansson,Goran Stemme,Hans Peter Starck Johnson
申请号：
US14157810
公开号：
US09687178B2
申请日:
2014.01.17
申请国别(地区):
US
年份:
2017
代理人:
摘要：
A micromachined fluid flow regulating device is disclosed comprising a fluid flow channel, at least one flow orifice formed in the channel, defining an inlet portion of the channel upstream of the flow orifice, an outlet portion of the channel downstream of the flow orifice, the fluid having a flow direction from the inlet portion to the outlet portion of the channel. At least one piston is arranged upstream of the flow orifice, movably suspended in the channel by a spring means such that the piston is movable by the fluid in the flow direction of the fluid, towards the flow orifice, to regulate a fluid flow through the flow orifice. The disclosure further relates to the use of a micromachined flow regulating device in a breath analysis device and to a method of fabricating a flow regulating device.
