Keith G. Fife;Joseph Lutsky;Lingyun Miao;Jianwei Liu
发明人:
Jianwei Liu,Keith G. Fife,Joseph Lutsky,Lingyun Miao
申请号：
US16585283
公开号：
US20200102214A1
申请日:
2019.09.27
申请国别(地区):
US
年份:
2020
代理人:
摘要：
A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
