Keith G. Fife,Lingyun Miao,Jianwei Liu,Jonathan M. Rothberg
申请号：
US16680956
公开号：
US20200147641A1
申请日:
2019.11.12
申请国别(地区):
US
年份:
2020
代理人:
摘要：
A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.
