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Acicular body manufacturing method and acicular body
专利权人:
凸版印刷株式会社
发明人:
上野 雅弘
申请号:
JP2008210522
公开号:
JP5515254B2
申请日:
2008.08.19
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
<;P>;PROBLEM TO BE SOLVED: To provide a method of manufacturing a needle-shaped material capable of accurately controlling its shape. <;P>;SOLUTION: The method of manufacturing the needle-shaped material includes the steps of forming a needle shape 11 on a monocrystal silicon substrate 10 and crystal-anisotropic-wet-etching the silicon substrate having the needle shape formed. The crystal anisotropic wet etching is known to have different etching rates depending on crystalline planes, and only a specific crystalline plane can be exhibited by crystal anisotropic etching. Thus, the crystal anisotropic etching after formation of the needle shape can make the shape of the needle-shaped body 15 as reference on the crystalline plane, and shape control can accurately take place. <;P>;COPYRIGHT: (C)2010,JPO&INPIT
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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