BELLEVILLE, CLAUDE,BUSSIERE, SYLVAIN,VAN NESTE, RICHARD
申请号：
CA2591787
公开号：
CA2591787C
申请日:
2005.12.12
申请国别(地区):
CA
年份:
2016
代理人:
摘要：
The invention provides a miniature robust fiber optic pressure sensor. Theminiature fiber optic sensor comprises a Fabry-Perot chip bonded to an opticalfiber. The invention provides a new sensor design that reduces the amount ofadhesive required to bond the optical fiber to the Fabry-Perot sensor suchthat the sensor is less sensitive to moisture. The invention also providesmanufacturing methods of the sensor comprising a method based on etching and amethod based on using an excimer laser. The invention also provides a chipdesign that renders the chip less sensitive to thermal changes. The inventionalso provides a chip design in which a sensor diaphragm has a well-definedthickness. The invention also provides a chip design that protects the chipfrom etching.
