In order arrangement of microstructure being the method of forming minutely, the material seat to make the microstructure deform which corresponds, boring the hole through process and the material seat which provide the holder in order to keep process and the material seat which it advances the punch which possesses the arrangement of the spine which formed respectively, facing toward the aforementioned punch and the material seat which is arranged between the die/di in home position in the spine of punch, arrangement of the aforementioned microstructure it has with the process which forms after the material seat.< Selective figure >Figure 6微細構造の配列を微細成形する方法であって、材料シートを対応する微細構造に変形させるためそれぞれ成形した突起部の配列を有するパンチを、前記パンチとダイの間に配置された材料シートに向かって前進させる工程と、材料シートを定位置に保持するためのホルダを設ける工程と、材料シートにパンチの突起部で穴を開けて、材料シート上に前記微細構造の配列を成形する工程とを備える。【選択図】図6