Michael J. Harrison,Andrew Y. Oleson,William D. Platt,Richard Grotyohann,Richard Wilheim Janse van Rensburg
申请号：
US14774278
公开号：
US09592661B2
申请日:
2014.03.13
申请国别(地区):
US
年份:
2017
代理人:
摘要：
A system for depositing an imprint onto a substrate includes a deposition surface having at least one outlet disposed therein, a substrate holder for holding the substrate against the deposition surface, means operatively associated with the deposition surface for supplying a material through said at least outlet to deposit said material onto the substrate, and a spacer member disposed in contact between the deposition surface and the substrate.
