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MEASURING DEVICE, MEASURING METHOD, AND TOMOGRAPHIC APPARATUS
专利权人:
CANON KABUSHIKI KAISHA
发明人:
Takeaki Itsuji
申请号:
US13769170
公开号:
US20130218008A1
申请日:
2013.02.15
申请国别(地区):
US
年份:
2013
代理人:
摘要:
A measuring device for measuring a physical property of an object which is irradiated with an electromagnetic wave pulse. The measuring device includes a waveform obtaining unit which obtains a time waveform from a signal relating to the electromagnetic wave pulse reflected from a first reflection portion and a second reflection portion of the object. The waveform obtaining unit obtains a first obtained waveform at a first collection point where a parallel region of the electromagnetic wave pulse is adjusted by a position adjusting unit so as to be in only one of the first reflection portion and the second reflection portion of the object, and obtains a second obtained waveform at a second collection point different from the first collection point. A waveform forming unit forms a measured waveform based on the first obtained waveform and the second obtained waveform.
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