PROBLEM TO BE SOLVED: To provide a method for manufacturing a radiation detector for reducing a gap and the radiation detector.SOLUTION: In the case of carrying out evaporation by using a plurality of evaporation sources (for example, four sources), the opening of a mask determining the shape of an evaporation face is moved or enlarged/reduced. Then, an end section generated due to the overlapping of layers (films) evaporated by each evaporation source is formed as an inclined section, and the angle of the end section becomes obtuse. Thus, it is possible to reduce a gap. When this invention is applied for evaporating a common electrode 3 which applies a bias voltage, the end section generated due to the overlapping of the common electrode 3 evaporated by each evaporation source is formed as an inclined section 3A, and the angle of the end section becomes obtuse. Thus, it is possible to improve durability against the bias voltage.COPYRIGHT: (C)2012,JPO&INPIT【課題】ギャップを減らすことができる放射線検出器の製造方法および放射線検出器を提供することを目的とする。【解決手段】複数の蒸着源(例えば4つのソース)を用いて蒸着を行う際に、蒸着面の形状を決定するマスクの開口部を移動、もしくは拡大あるいは縮小させて蒸着を行うことにより、各蒸着源で蒸着形成される層(膜)の重ね合わせで生じる端部が傾斜部となり、端部の角度が鈍るのでギャップを減らすことができる。バイアス電圧を印加する共通電極3を蒸着するのに適用する場合には、各蒸着源で蒸着形成される共通電極3の重ね合わせで生じる端部が傾斜部3Aとなり、端部の角度が鈍るのでバイアス電圧に対する耐久性が向上する。【選択図】図1
