PROBLEM TO BE SOLVED: To provide an ultrahigh speed review device and an ultrahigh speed review method of acquiring the image of a measurement point on a sample at an ultrahigh speed and estimating the specification of a substance such as foreign matter at a microregion in the vicinity without reducing the throughput of the total.SOLUTION: The device includes: a grouping means in which, based on measurement object coordinate data obtained by setting the coordinates as a plurality of measurement objects on a sample, the measurement objects totally scanning a plurality of the measurement objects on the sample are grouped to create measurement object groups; and a scanning image acquiring means in which, per measurement object group grouped by the grouping means, the sample is moved at a high speed as possible between the measurement object groups, and, in the measurement object groups, while the sample is moved at a fixed speed in the measurement object group, the scanning is repeatedly performed in the movemen
