DISPOSITIFS MICRO-NANOFLUIDIQUES FLEXIBLES

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专利权人:

IKERLAN, S. COOP; S. COOP;POC MICROSOLUTIONS, SL;IKERLAN

发明人:

BLANCO BARRO, FCO. JAVIER,AGUIRREGABIRIA IZAGUIRRE, MARIA,EZKERRA FERNANDEZ, AITOR,SCHULZE, JANETTE LILIAN MARIA,RUANO LOPEZ, JESUS MIGUEL,MAYORA ORIA, KEPA

申请号：

EP07765875

公开号：

EP2022753A4

申请日:

2007.05.22

申请国别(地区):

EP

年份:

2013

代理人:

摘要：

A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2)； carrying out photolithography at low temperature to the layers of photo-curable resin； depositing metallic-type components (4) in the capsule； micro-structuring the deposited metallic components； depositing a layer of photo-curable resin from heat set polymer on capsule 1； carrying out photolithography； sealing the obtained capsules； and cutting the device.

来源网站：

中国工程科技知识中心

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http://www.ckcest.cn/home/