PROBLEM TO BE SOLVED: To provide a liquid supply device which is small-sized, light-weight, and has simplified structure and small footprint, and is excellent in convenience and which can supply a required amount of liquid with high accuracy.SOLUTION: There is provided a liquid supply device in which a cylinder whose both end parts are sealed is divided into two sections being a liquid housing part and a pressurized gas introduction part, by a piston inserted into the cylinder, liquid in the liquid housing part is delivered by the piston which moves forward being pushed by gas pressure of the pressurized gas introduction part. A liquid injection pipe communicated with a liquid supply source and a liquid delivery pipe communicated with a supply destination are connected to the liquid housing part, and a pressurized gas introduction pipe communicated to a pressurized gas source is connected to the pressurized gas introduction part. Furthermore, the liquid supply device includes: a displacement sensor which measures a distance at which the piston parallelly moves in a direction of the liquid housing part side by gas pressure from the pressurized gas introduction part side and control means for controlling supply of liquid, whose delivery amount is calculated from a parallel movement distance of the piston measured by the displacement sensor and an inner diameter of the cylinder, to a supply destination at a required amount.COPYRIGHT: (C)2015,JPO&INPIT【課題】 小型、軽量、かつ、構造が簡単、省スペースで、利便性にも優れ、そして、所要量の液体を精度よく供給し得る液体供給装置を提供すること。【解決手段】 両端部封止のシリンダーがその内部に装入されたピストンにより液体収容部と加圧気体導入部とに2分画されていて、液体収容部の液体を加圧気体導入部の気体圧で押進するピストンにより送出する液体供給装置であって、液体収容部には液体供給源に連通する液体注入管及び供給先に連通する液体送出管が連結され、加圧気体導入部には加圧気体源に連通する加圧気体導入管が連結され、更に、気体圧によりピストンが液体収容部側方向に平行移動する距離を加圧気体導入部側から計測する変位センサ、及び変位センサで計測されたピストンの平行移動距離とシリンダーの内径とから送出量が求められる液体を供給先に所要量で供給することを制御する制御手段が備えられた、前記装置。【選択図】図1
