LINDEBOOM, BARTHOLOMEUS HANS LOUIS,林迪邦 巴索罗玛斯 Ｈ Ｌ,林迪邦 巴索羅瑪斯 Ｈ Ｌ
申请号：
TW107142073
公开号：
TW201930789A
申请日:
2018.11.26
申请国别(地区):
TW
年份:
2019
代理人:
摘要：
An apparatus (10), including a gas recirculation circuit comprising a mini environment chamber (14), a gas pump (16), a filter assembly (22) which are connected by a recirculation channel (20). The apparatus additionally includes an air supply conduit (18) for supplying air to the gas recirculation circuit and having an air supply conduit inlet (18a) which opens into the ambient air and an air supply conduit outlet (18b) which opens in the recirculation circuit. In use, a mini environment chamber pressure (Pme) is maintained higher than the ambient pressure (Pam). The gas recirculation channel (20) includes a substantially frictionless recirculation restriction embodied as a throat (30). At downstream end of the throat which forms the narrow part of the throat, in use, the static pressure is below the ambient pressure. The air supply conduit outlet opens at the downstream end (30a) of the throat.本發明係關於一種裝置，其包括一氣體再循環電路，該氣體再循環電路包含藉由一再循環通道連接之一迷你環境腔室、一氣泵、一過濾器總成。該裝置另外包括一空氣供應管道，該空氣供應管道用於將空氣供應至該氣體再循環電路且具有開放至環境空氣中之一空氣供應管道入口及在該再循環電路中開放的一空氣供應管道出口。在使用中，一迷你環境腔室壓力(Pme)經維持高於環境壓力(Pam)。該氣體再循環通道包括具體化為一喉部之一實質上無摩擦再循環限制件。在該喉部的形成該喉部之窄部分的下游末端處，在使用中，靜態壓力在該環境壓力以下。該空氣供應管道出口在該喉部之該下游末端處開放。
