Rohm and Haas Electronic Materials CMP Holdings, Inc.
发明人:
Cantrell Brian T.
申请号：
US201615231926
公开号：
US10086543(B2)
申请日:
2016.08.09
申请国别(地区):
美国
年份:
2018
代理人:
Merriam Andrew`Biederman Blake T.
摘要：
The present invention provides an apparatus for use in mixing and dispensing a curable fluid stream (stream) into an open mold to fill the mold to make polishing pads for chemical mechanical planarization of substrates. The apparatus comprises an actuator frame on which is mounted (i) a set of two plates releasably attached to the actuator frame and adapted to cut the stream when the mold is full and to release from the actuator frame after cutting the stream, and (ii) a dispenser unit for continuous pouring of the stream into an open mold, the apparatus adapted to enable removal of the released plates from the actuator during the continuous pouring after the mold is full, e.g. by raising the actuator frame and the (ii) dispenser unit, whereby one can place a container above the mold to catch the plates.
