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Apparatus and method for retaining and releasing solid material
专利权人:
发明人:
申请号:
EP10165348.3
公开号:
EP2394618B1
申请日:
2010.06.09
申请国别(地区):
EP
年份:
2012
代理人:
摘要:
An apparatus for making a structure comprising solid material and typically a substrate, said apparatus comprising a first moving endless surface and adjacent thereto one or more stationary primary (vacuum) gas containers (chambers), at least one thereof being connected to a secondary (vacuum) gas container, whereby the pressure difference between primary and secondary containers is minimized and methods using such an apparatus.
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