PROBLEM TO BE SOLVED: To provide an actuator, having a sensor built in, which is unlikely to be influenced by an driving electrode.SOLUTION: The sensor includes an electrolyte membrane, first and second drive electrodes which are arranged on mutually opposite surfaces of the electrolyte membrane, and impart a potential difference to the electrolyte membrane, the sensor which is formed on the electrolyte membrane and detects force operating on the electrolyte membrane, and a drive control circuit which supplies a drive voltage to the first and second drive electrode layers based upon a command signal and detection output of the sensor, and the drive control circuit applies a PWM drive voltage having a duty ratio corresponding to the deviation between the command signal and the detection output of the sensor between the first and second drive electrodes.COPYRIGHT: (C)2012,JPO&INPIT【課題】センサーを内蔵するアクチュエーターにおいて駆動電極の影響を受けにくいセンサーを提供する。【解決手段】電解質膜と、上記電解質膜の互いに対向する面にそれぞれ配置されて該電解質膜に電位差を与える第1及び第2の駆動電極と、上記電解質膜上に形成されて該電解質膜に作用する力を検出するセンサーと、指令信号と上記センサーの検出出力とに基づいて上記第1及び第2の駆動電極層に駆動電圧を供給する駆動制御回路と、を備え、上記駆動制御回路は、上記指令信号と前記センサーの検出出力との偏差に対応したデューティ比のPWM駆動電圧を上記第1及び第2の駆動電極相互間に印加する。【選択図】図11
