A system for gas sterilization includes a sterilization chamber a source of sterilant gas and a sterilant gas remediation mechanism. Embodiments relate to systems and methods for delivering humidified air to a sterilization chamber systems and methods for removing gaseous N02 from an exhaust gas stream of a sterilization chamber systems and methods for removing and replacing a source of sterilant gas an exhaust gas scrubber and/or supplies for a humidif ication system.