Disclosed is an inorganic laminated thin film, inexpensive yet retain low surface resistivity and great resistance to chemical agents. The inorganic laminated thin film could be the electrode film used in biosensors such as the blood sugar sensor.The above mentioned inorganic laminated thin film is configured to be laminated at least directly on a single surface of the substrate or be laminated on other layer which is on the substrate. In the method of cyclic voltammetry detecting for ferrocyanide ions, which takes silver/silver chloride as the reference electrode, the peak current of oxidation shows within +0.2V~+0.9V and the peak current of reduction shows within -0.3V~+0.4V.本發明的課題為提供一種無機薄膜積層膜,雖屬便宜的無機薄膜,仍具有低表面阻抗值、耐藥品性,並適合作為血糖值感測器等生物感測器用電極膜使用。上述無機薄膜積層膜係於基材的至少單面上直接或隔著其他層積層無機薄膜的膜,在以銀/氯化銀作為參考電極的亞鐵氰化物離子的循環伏安法測定中,在+0.2V至+0.9V之間的電位顯示氧化尖峰電流,在-0.3V至+0.4V之間的電位顯示還原尖峰電流。
