您的位置: 首页 > 农业专利 > 详情页

ÉLÉMENT SENSIBLE À LA PRESSION, CAPTEUR DE PRESSION, ET PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT SENSIBLE À LA PRESSION
专利权人:
Nippon Mektron; Ltd.
发明人:
申请号:
EP15747084.0
公开号:
EP3246685A4
申请日:
2015.01.14
申请国别(地区):
EP
年份:
2018
代理人:
摘要:
Provided is a pressure sensing element capable of demonstrating a good initial detection sensitivity both in the flat state and the bent state, and is prevented from causing short-circuiting in the initial state; a pressure sensor equipped with the pressure sensing element; and a method of manufacturing a pressure sensing element. A pressure sensing element (100) includes a support substrate (11); a sensor electrode (12) supported by the support substrate (11); a pressure sensing film (14) functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (12); and an insulating layer (13) which keeps the sensor electrode (12) and the pressure sensing film (14) apart from each other by a predetermined distance A, and has formed therein an opening (20) in which the sensor electrode (12) is exposed to the pressure sensing film (14), the insulating layer (13) having an aperture wall (13b) which partitions the opening (20), and an aperture end (top aperture end (13a)) faced to the pressure sensing film (14), and the insulating layer (13) being increased in height, measured from the support substrate (11), continuously towards the opening (20).
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充