PROBLEM TO BE SOLVED: To provide an ultrasonic device capable of executing ultrasonic measurement with respect to a desired direction with high accuracy, and an ultrasonic probe and an ultrasonic apparatus.SOLUTION: An ultrasonic device comprises: a substrate 411 having an opening 411A a vibration film 412 closing the opening a piezoelectric element 413 being provided on the vibration film and overlapping with the opening in a planar view as viewed from a thickness direction of the substrate an acoustic layer 414 provided on the vibration film an acoustic shielding part 8 being provided on the acoustic layer, surrounding a part of the opening in the planar view, and shielding an ultrasonic wave and an acoustic lens 7 provided at an opposite side to the vibration film of the acoustic layer. In the planar view, at least one of a center of the acoustic shielding part and an apex of the acoustic lens does not overlap with a center of the opening.SELECTED DRAWING: Figure 6COPYRIGHT: (C)2019,JPO&INPIT【課題】所望の方向に対して高い精度で超音波測定を実施可能な超音波デバイス、超音波探触子、及び超音波装置を提供する。【解決手段】開口部411Aを有する基板411と、開口部を閉塞する振動膜412と、振動膜に設けられ、基板の厚み方向から見た平面視において、開口部と重なる圧電素子413と、振動膜に設けられた音響層414と、音響層に設けられ、平面視において開口部の一部を囲い、超音波を遮蔽する音響遮蔽部8と、音響層の振動膜とは反対側に設けられた音響レンズ7と、を備え、平面視において、音響遮蔽部の中心及び音響レンズの頂部の少なくともいずれか一方は、開口部の中心と重ならない。【選択図】図6
