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Method and Apparatus for Coating Nanoparticulate Films on Complex Substrates
专利权人:
发明人:
Juan Kiwi,Sami Rtimi,César Pulgarin
申请号:
US15039457
公开号:
US20160376694A1
申请日:
2013.11.27
申请国别(地区):
US
年份:
2016
代理人:
摘要:
Active films and processes for depositing the same onto a complex 3D shape substrates and implants are provided. The process comprises the following steps: inserting into a process chamber a sputtering target, including at least two chemical elements and a complex shape 3D substrate on a substrate holder, providing a gas to be ionized into the process chamber with a controlled pressure applying a voltage in pulse between the sputtering target and the complex shape 3D substrate and generating a magnetic field at the surface of the sputtering target inside the process chamber as required for HIPIMS.
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