A heating apparatus for heating a cavity inside a chamber. The apparatus may include a first heater at the bottom of the chamber, a second heater at the top of the chamber, at least one air inlet connected to the chamber and at least one air outlet connected to the chamber.本發明揭示一種用於加熱一腔室內部之一腔穴之加熱裝置。該裝置可包含:一第一加熱器,其位於該腔室之底部;一第二加熱器,其位於該腔室之頂部;至少一進氣口,其連接至該腔室;及至少一出氣口,其連接至該腔室。200‧‧‧加熱裝置/加熱器/加熱器裝置201‧‧‧底部件202‧‧‧底部加熱器203‧‧‧頂部件204‧‧‧頂部加熱器206‧‧‧進氣口208‧‧‧出氣口222‧‧‧網格232‧‧‧固持加熱器234‧‧‧頂板
