Guozhong Cao;I-Yeu Shen;Chuan Luo;Cheng-Chun Lee;Clifford R. Hume
发明人:
I-Yeu Shen,Cheng-Chun Lee,Clifford R. Hume,Guozhong Cao,Chuan Luo
申请号：
US13427727
公开号：
US20120245408A1
申请日:
2012.03.22
申请国别(地区):
US
年份:
2012
代理人:
摘要：
Disclosed are methods and systems for improving actuator performance by reducing tensile stresses in piezoelectric thin films. In one embodiment, a piezoelectric actuator includes a substrate, a first electrode positioned on the substrate, a piezoelectric thin film positioned on the first electrode, and a second electrode positioned on the piezoelectric thin film. The displacement capability of the actuator is enhanced by reducing the tensile stresses of the piezoelectric thin film. In some embodiments, a constant DC voltage applied to the piezoelectric actuator generates compressive in-plane stresses, which counteract the tensile in-plane stresses. As a result, the overall tensile stresses in the actuator are reduced, and the actuator displacement is improved.
