PROBLEM TO BE SOLVED: To provide a technology which realizes a through wiring structure securing device performance, enabling reduction of the manufacturing costs, and having low resistance and high chemical resistance, and to provide an electrostatic capacitance type transducer using the technology.SOLUTION: An electrostatic capacitance type transducer includes: a substrate 1 having through wiring 2 which penetrates a space between a first surface 1a and a second surface 1b facing each other and a cell provided on the first surface and including a first electrode 4 and a second electrode 6 which is provided so as to form a clearance 5 with the first electrode. Conductive protection films 3 are formed on a surface side of the through wiring at the first surface side and the second surface side.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2016,JPO&INPIT【課題】デバイス性能の確保や製造コストの低減を可能とし、低抵抗で高薬品耐性の貫通配線構造を実現する技術およびそれを用いた静電容量型トランスジューサを提供する。【解決手段】静電容量型トランスデューサは、対向する第1面1aと第2面1bの間を貫通する貫通配線2を有する基板1と、第1面上に設けられ、第1の電極4と、この第1の電極と間隙5を隔てて設けられた第2の電極6と、を備えるセルと、を有する。第1面側及び第2面側において、貫通配線の表面側に導電性保護膜3が形成されている。【選択図】図1
