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光画像計測装置
专利权人:
株式会社トプコン
发明人:
清水 仁,藤村 隆
申请号:
JP2016135983
公开号:
JP6165935B2
申请日:
2016.07.08
申请国别(地区):
JP
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide an optical image measuring apparatus having high transverse resolution and capable of obtaining a sharp image as a whole.SOLUTION: An optical system of the optical image measuring apparatus according to the present embodiment, includes: a scanning part for changing an irradiation position of a signal light to an object and a focal position change part for changing a focal position of the signal light, and detects interference light between return light of each signal light and reference light. An image forming part forms a tomographic image from a plurality of detection results of interference light corresponding to a plurality of irradiation positions of the signal light. A control part controls the optical system and repetitively irradiates the plurality of irradiation positions with the signal light, while changing the focal position. A synthetic tomographic image forming part forms one synthetic tomographic image from two or more tomographic images formed on the basis of the repetitive irradiation results of the signal light. The synthetic tomographic image forming part includes a partial image specification part that specifies, for each tomographic image, a partial image of the tomographic image including an image area equivalent to the corresponding focal position, and synthesizes two or more specified partial images to form a synthetic tomographic image.SELECTED DRAWING: Figure 3
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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