PROBLEM TO BE SOLVED: To provide an actuator having a structure capable of reducing stress concentration to an elastic member of the actuator in a manufacturing process, and preventing a damage to the elastic member.SOLUTION: An actuator 1 includes: a movable member 4 an elastic member 5 connecting the movable member with a bearing member 2 and an electrode pair having an interdigital electrode structure for displacing the movable member in a direction normal to a reflection plane. All movable interdigital electrodes 6 extending from the movable member are substantially in parallel. A portion starting to extend from the movable member 4 of the elastic member 5 is substantially in parallel with the movable interdigital electrodes 6.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2016,JPO&INPIT【課題】製造工程において、アクチュエータの弾性部材への応力集中を低減できて、弾性部材の破損の抑制を可能とする構成を有するアクチュエータなどを提供する。【解決手段】アクチュエータ1は、可動部材4と、可動部材と支持部材2とを繋ぐ弾性部材5と、可動部材を反射面に垂直な方向に変位させるための櫛歯電極構造の電極対を有する。可動部材から延出する全ての可動櫛歯電極6が略平行であり、弾性部材5の、可動部材4から延出し始める部分が、可動櫛歯電極6と略平行である。【選択図】図1
