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COVER PLATE FOR A PROCESSING CHAMBER
专利权人:
发明人:
Tobias KEUNE,Willem Jacobus REIJERSEN VAN BUUREN
申请号:
US14898364
公开号:
US20160135373A1
申请日:
2014.07.07
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An arrangement includes a processing chamber, at least one cover plate for the processing chamber, and a holding assembly. The holding assembly is arranged to hold the cover plate at an outer surface of the processing chamber. A method for operating such an arrangement is disclosed. The holding arrangement guides the cover plate with respect to the processing chamber from a covering position into an access-enabling position and back from the access-enabling position into the covering position. The cover plate in the covering position covers a part of the outer surface of the processing chamber. The distance between the cover plate in the access-enabling position and the processing chamber occurs. The cover plate is moved from the covering position into the access-enabling position along a curved opening trajectory. This opening trajectory is horizontal or is sloping with respect to the ground.
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中国工程科技知识中心
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http://www.ckcest.cn/home/

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