A study of the performance of microfabricated electroosmotic pump

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作   者：

.S. Hua;  Christopher Y.H. Chao; 

作者机构：

The Hong Kong University of Science and Technology;  Clear Water Bay;  Department of Mechanical Engineering;  Hong Kong; 

关键词：

Microfabricated;  Electroosmotic micro pump;  Electrical double layer;  Performance; 

期刊名称：

Sensors and Actuators, A. Physical

i s s n：

0924-4247

年卷期：

2007 年 135 卷 1 期

页   码：

273-282

页   码：

摘   要：

Microfabricated planar electroosmotic (EO) pump is an innovative micro pump which promotes chip-level integration in micro devices such as micro cooling and micro combustion systems. A numerical model for this kind of micro pump was established avoiding the use of Boltzmann equation and is able to simulate the performance of the microfabricated EO pump with the depth comparable to the EDL thickness. A fabrication process was designed and several EO micro pump protocols were fabricated successfully. Both experimental and numerical studies were carried out. The results from the experiments and numerical simulation agreed with each other well. The effects of pump depth, fluid temperature, applied voltage and bulk ionic concentration on the pumping performance were studied.