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Data from: Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coeffic
- 负责人:
- DOI:
- doi:10.5061/dryad.2g2m7
- 摘要:
- les in the literature address the implementation of hydrothermal PZT films on curved-diaphragm substrates for resonators. In this study, a 50-?m-thick titanium sheet
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