INSTITUTUL NAŢIONAL CERCETARE-DEZVOLTARE PENTRU OPTOELECTRONICĂ - INOE 2000
发明人:
VLĂDESCU ALINA,VLĂDESCU ALINA,BRAIC MARIANA,BRAIC MARIANA,BĂLĂCEANU MIHAI,BĂLĂCEANU MIHAI,BRAIC VIOREL,BRAIC VIOREL,KISS ADRIAN EMIL,KISS ADRIAN EMIL
申请号:
RO201101212
公开号:
RO128641B1
申请日:
2011.11.24
申请国别(地区):
RO
年份:
2016
代理人:
摘要:
The invention relates to materials made of biocompatible thin layers as multilayer coatings consisting of alternating binary carbides or nitrides and quaternary carbo-nitrides of biocompatible transition metals, such as Ti, Zr, Nb, Ta, Hf, for biomedical applications, which are obtained by vapour-phase deposition, using the magnetron sputtering or the cathodic arc, in a reactive plasma which may contain Ti, Zr, Nb, Ta, Hf, N and/or C atoms or ions, depending on the nature of the deposited materials. According to the invention, the materials comprise 4...1000 individual alternating layers of TiN, ZrN, NbN, TaN, HfN or TiC, ZrC, NbC, TaC, HfC and TiZrCN, TiHfCN, TiTaCN, TiNbCN, ZrHfCN, ZrTaCN, ZrNbCN, TaHfCN, TaNbCN or NbHfCN, having thicknesses in the range of 20...250 nm, the individual layers thickness ratio in the range of 0.4...2 and a total thickness of the multilayer coating in the range of 1...4 &mum, with good adherence to the substrate, the normal critical forces measured upon the endurance scratch test being of 28...52 N, with a microhardness in the range of 18...32 GPa, exhibiting an average roughness < 10 nm and the value of the cell viability factor in the range of 87...96% upon the toxicity test.Invenţia se referă la nişte materiale din straturi subţiri biocompatibile, sub formă de multistrat format din straturi alternante de nitruri sau carburi binare şi carbonitruri cuaternare ale unor metale de tranziţie biocompatibile, cum sunt Ti, Zr, Nb, Ta, Hf, pentru aplicaţii biomedicale, obţinute prin depunere din fază fizică de vapori, folosind pulverizarea magnetron sau arcul catodic, într-o plasmă reactivă care poate conţine atomi şi ioni de Ti, Zr, Nb, Ta, Hf, N şi/sau C, în funcţie de natura materialelor depuse. Materialele conform invenţiei sunt formate din 4...1000 straturi individuale alternate de TiN, ZrN, NbN, TaN, HfN sau TiC, ZrC, NbC, TaC, HfC şi TiZrCN, TiHfCN, TiTaCn, TiNbCN, ZrHfCN, ZrTaCN, ZrNbCN, TaHfCN, TaNbCN sau NbHfCN, având grosimi c