Christian BROCKMANN,Thomas FREITAG,Christoph KNOPF
申请号：
US15778989
公开号：
US20180344382A1
申请日:
2016.12.08
申请国别(地区):
US
年份:
2018
代理人:
摘要：
The electrode head includes two working surfaces in accordance with an actual bipolar electrode. These may be manufactured lithographically, exhibiting even more complicated outlines. Working surfaces are depicted, which are structured as annulus sector-shaped, concentrically arranged areas, when projected in a plane. Moreover, a further area is situated centrally, which is disc-shaped in a planar projection. Plasma is ignited alternately at both poles. If the individual concentric zones are situated close enough with respect to each other a continuous plasma layer will result.
